|
Magnification
|
20X ~ 300,000X
|
|
Resolution
|
3nm with SE detector
|
|
Acceleration Voltage
|
200V ~ 30kV Continuously Adjustable
|
|
Detector
|
SE, BSE (Optional)
|
|
Electron Gun
|
Precentered Tungsten Filament
|
|
Objective IRIS
|
4-step Variable Aperture (20/20/50/100µm)
|
|
Image Shift
|
±50µm
|
|
Stage
|
Manual 3-Axis stage (X,Y: 40mm / Z: 5~45mm), Manual (T: -20°~90° / R: 360°)
|
|
Optional Stage
|
Motorized 3-Axis stage (X,Y: 90mm / Z: 5~60mm), Manual (T: -20°~90° / R: 360°)
|
|
Automatic Function
|
Auto Focus, Auto Brightness / Contrast, Auto Gun alignment
|
|
Maximum Sample Size
|
Horizontal: 96mm / Vertical: 45mm
|
|
Display Mode
|
Focus Mode
|
|
Focus Mode
|
320 x 240 pixel, Resizable
|
|
Preview Mode
|
800 x 600 pixel
|
|
Slow Mode
|
Applicable to both preview and focus mode
|
|
Photo Mode
|
Up to 3200 x 2400
|
|
Image Format
|
JPG / TIFF / BMP
|
|
Image Storage Pixel
|
940×705 pixel / 1024×768 pixel / 1664×1248 pixel / 3200×2400 pixel
|
|
Vacuum System
|
Automated Evacuation System
Turbo molecular pump (Vacuum ready within 3 minutes)
Rotary vane pump
Electrical valve system (compressor NOT required)
|
|
Vacuum Mode
|
High Vacuum Mode (< 9×10⁻³ Pa) / Charge Reduction Mode
|
|
Working Distance
|
5~45mm
|
|
EDS
|
Oxford, Bruker, EDAX, Thermo compatible
|
|
Optional Devices
|
EBSD
WDS
CL
Chamber Camera
LaB6/CeB6 Upgrade
3D Imaging
Raman Spectroscopy
E-beam Lithography
|
|
Dimension (mm)
|
600(W) x 623(D) x 1350(H) mm
|
|
Weight
|
130kg
|
